Capacitive sensors are widely used in the accurate measurement of angles, displacements, liquid levels and other parameters. Capacitive sensors have the advantages of high sensitivity and high precision, but these advantages are all related to the design of the sensor is correct, the material selection is correct and the processing technology is fine. However, be aware of the following factors that affect the accuracy of capacitive sensors.
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1. The effect of temperature on the size of the structure
Changes in ambient temperature will cause changes in the collective size and mutual position of the various components of the capacitive sensor, resulting in temperature-added errors in the capacitive sensor. This error is especially acute in capacitive sensors that detect gap changes because of its initial The gap is small.
2. The effect of temperature on the dielectric constant
The capacitance value of the capacitive sensor is proportional to the dielectric constant of the medium. Therefore, for a sensor whose temperature coefficient of the dielectric constant is not zero, the temperature change will inevitably cause a change in the capacitance value of the sensor, thereby causing a temperature error.
3. Influence of leakage resistance
Capacitive sensors have high capacitive reactance, especially when the excitation frequency is low. When the total leakage resistance between the two poles is close to the capacitive reactance, it is necessary to consider the effect of the shunting action on the overall sensitivity of the entire system, which will reduce the sensitivity of the sensor.
4. Edge effect and the influence of parasitic parameters
Edge effects complicate design calculations, create nonlinearities, and reduce sensor sensitivity. The method of eliminating and reducing is to add a guard electrode to the structure, and the guard electrode must take the same potential as the guard electrode, and try to make them the same ground potential.